Wafer Carrier (HWS) 抗靜電傳送盒

型号:MA-4/5/6S/8S/12 ; NA-8M; NA-300LA
Product Number   •MA-4 (4inch wafer shipper)
  •MA-5 (5inch wafer shipper)
  •MA-6S (6inch wafer shipper) ※slim type case
  •MA-8S (8inch wafer shipper) ※slim type case
  •NA-8M
  •NA-300LA (12inch wafer shipper)
Features   •Excellent airtightness.
  •Designed to be compatible with automated handling machines.
  •Industry standard wafer sizes available. (4-inch, 5-inch, 6-inch, 8-inch, 12-inch)
  •Two types of cushions and two types of spacers are available. (Sold separately)
Surface Resistance    MA-4,5,6S,8S : R <10^6Ω
  NA-8M,NA-300LA : 10^4 Ω < R < 10^9 Ω
Material   Conductive Polypropylene

Specification

Product Number Wafer Diameter Container
height
Height 0f storage Stored wafer diameter Container
width/length
Weight
MA-4   4 inch
  (100mm)
90mm 47.8mm 103±1mm 150mm 0.36kg
MA-5   5 inch
  (100mm)
90mm 50.0mm 128±1mm 150mm 0.31kg
MA-6S 6 inch
(150mm)
63mm 38.0mm 153±1mm 175mm 0.34kg
MA-8S 8 inch
(200mm)
65mm 38.0mm 203±1mm 226mm 0.5kg
NA-8M 8 inch
(200mm)
93mm 69.0mm 202±1mm 226mm 0.59kg
NA-300LA 12 inch
(300mm)
79mm 44.0mm 301.9+1/-0.2mm 328mm 1.19kg

Recommended cushion & interleaf

Product Number performance cushion interleaf
MA-4 antistatic MA-4PEAS-□ PEA-4-350(Z1)
conductive MA-4PESD-■ CPS-4-350(Z2)
MA-5 antistatic MA-5PEAS-□ PEA-5-350(Z1)
conductive MA-5PESD-■ CPS-5-350(Z2)
MA-6S antistatic MA-6PEAS-□ PEA-6-350(Z1)
conductive MA-6PESD-■ CPS-6-350(Z2)
MA-8S antistatic MA-8PEAS-□ PEA-8-350(Z1)
conductive MA-8PESD-■ CPS-8-350(Z2)
NA-8M contactless MA-8PEAS-□
MA-8PESD-■
T-WSR200W
NA-300LA antistatic MA-12PEAS-□ PEA-12-350(Z1)
conductive MA-12PESD-■ CPS-12-350(Z2)

*□:1/3/5/6/10 (=thickness [unit:mm])
*■:1/3/5/10 (=thickness [unit:mm])