| Product Number | •MA-4 (4inch wafer shipper) •MA-5 (5inch wafer shipper) •MA-6S (6inch wafer shipper) ※slim type case •MA-8S (8inch wafer shipper) ※slim type case •NA-8M •NA-300LA (12inch wafer shipper) |
|---|---|
| Features | •Excellent airtightness. •Designed to be compatible with automated handling machines. •Industry standard wafer sizes available. (4-inch, 5-inch, 6-inch, 8-inch, 12-inch) •Two types of cushions and two types of spacers are available. (Sold separately) |
| Surface Resistance | MA-4,5,6S,8S ： R <10^6Ω NA-8M,NA-300LA ： 10^4 Ω < R < 10^9 Ω |
| Material | Conductive Polypropylene |
Specification
| Product Number | Wafer Diameter | Container height |
Height 0f storage | Stored wafer diameter | Container width/length |
Weight |
|---|---|---|---|---|---|---|
| MA-4 | 4 inch (100mm) |
90mm | 47.8mm | 103±1mm | 150mm | 0.36kg |
| MA-5 | 5 inch (100mm) |
90mm | 50.0mm | 128±1mm | 150mm | 0.31kg |
| MA-6S | 6 inch (150mm) |
63mm | 38.0mm | 153±1mm | 175mm | 0.34kg |
| MA-8S | 8 inch (200mm) |
65mm | 38.0mm | 203±1mm | 226mm | 0.5kg |
| NA-8M | 8 inch (200mm) |
93mm | 69.0mm | 202±1mm | 226mm | 0.59kg |
| NA-300LA | 12 inch (300mm) |
79mm | 44.0mm | 301.9+1/-0.2mm | 328mm | 1.19kg |
Recommended cushion & interleaf
| Product Number | performance | cushion | interleaf |
|---|---|---|---|
| MA-4 | antistatic | MA-4PEAS-□ | PEA-4-350(Z1) |
| conductive | MA-4PESD-■ | CPS-4-350(Z2) | |
| MA-5 | antistatic | MA-5PEAS-□ | PEA-5-350(Z1) |
| conductive | MA-5PESD-■ | CPS-5-350(Z2) | |
| MA-6S | antistatic | MA-6PEAS-□ | PEA-6-350(Z1) |
| conductive | MA-6PESD-■ | CPS-6-350(Z2) | |
| MA-8S | antistatic | MA-8PEAS-□ | PEA-8-350(Z1) |
| conductive | MA-8PESD-■ | CPS-8-350(Z2) | |
| NA-8M | contactless | MA-8PEAS-□ MA-8PESD-■ |
T-WSR200W |
| NA-300LA | antistatic | MA-12PEAS-□ | PEA-12-350(Z1) |
| conductive | MA-12PESD-■ | CPS-12-350(Z2) |
＊□：1/3/5/6/10 (=thickness [unit:mm])
＊■：1/3/5/10 (=thickness [unit:mm])