導電性 Ring Spacer

型号:T-WSR200W

Features

  • No contact with wafer for transport
  • Low particle
  • Low ion contamination
  • Low outgassing

Specification

Model number  T-WSR200X
Material  Conductive PC
Surface
Resistance
 R < 1.0×10^7 Ω
Carton size
(500pcs/carton)
 430mm × 420mm × 290mm
 weght:5.5kg

Ion contamination comparison

Sample Anion
F  Cl   NO2 Br  NO3  SO4  PO4
T-WSR200W  ND  ND ND ND  ND ND ND
Sample Cation  
Li  Na NH4 K Mg Ca
T-WSR200W  ND  ND ND ND  ND ND

※Unit : ppb(μg /l)
* This data is an actual measurement value, not a uaranteed value.