Wafer Inner Tray 晶片分隔盤

型号:VFS-4-6R-65 / VFS-6-8R-65

Protos Inner Tray

Product No.  VFS-4-6R-65(for 4 inch compound wafer)
 VFS-6-8R-65(for 6 inch compound wafer)
Features  • Can transfer/transport brittle compounding wafers.
 • Adopting clean conductive material.
 • Low particle level.
 • Low outgas generation.
 • High transparency.
Resistance  < 1.0×107Ω
Material  conductive A-PET

※When both protos carrier and spacers are used.