Protos Inner Tray
| Product No. | VFS-4-6R-65(for 4 inch compound wafer) VFS-6-8R-65(for 6 inch compound wafer) |
|---|---|
| Features | • Can transfer/transport brittle compounding wafers. • Adopting clean conductive material. • Low particle level. • Low outgas generation. • High transparency. |
| Resistance | < 1.0×107Ω |
| Material | conductive A-PET |
※When both protos carrier and spacers are used.